An Analytical Capacitance Model for Through-Silicon Vias in Floating Silicon Substrate

Weerasekera, Roshan; Katti, Guruprasad; Dutta, Rahul; Zhang, Songbai; Chang, Ka Fai; Zhou, Jun; Bhattacharya, Surya

Abstract

© 2016 IEEE. Through-silicon via (TSV) is an integral part of 2.5-D IC technology leveraged for multichip heterogeneous integration to achieve shorter interconnects, faster speed, and lower power consumption in the state-of-the-art circuit systems. These 2.5-D ICs use a silicon substrate, where there are no ground contacts unlike traditional 2-D ICs or 3-D ICs. TSVs in such electrically floating substrates call for new electrical models as well as improved parasitic extraction (PEX) methodology. Therefore, in this paper, an analytical capacitance model for TSVs in a 2.5-D IC is derived and validated. A TSV-to-TSV crosstalk expression is also validated and further extended to create an accurate 2.5-D IC PEX framework in addition to design robust grounding schemes, such that the TSV-to-TSV crosstalk coupling in an entire 2.5-D IC would be minimal even with floating silicon substrate. It is shown that a large number of regularly distributed power and ground TSVs provide an effective shield for the TSV-to-TSV crosstalk coupling and are highly recommended in the 2.5-D ICs.

Citation

Weerasekera, R., Katti, G., Dutta, R., Zhang, S., Chang, K. F., Zhou, J., & Bhattacharya, S. (2016). An Analytical Capacitance Model for Through-Silicon Vias in Floating Silicon Substrate. IEEE Transactions on Electron Devices, 63(3), 1182-1188. https://doi.org/10.1109/TED.2016.2522501

• Journal Article Type: Article
• Acceptance Date: Jan 14, 2016
• Publication Date: Mar 1, 2016
• Journal: IEEE Transactions on Electron Devices
• Print ISSN: 0018-9383
• Publisher: Institute of Electrical and Electronics Engineers
• Peer Reviewed: Peer Reviewed
• Volume: 63
• Issue: 3
• Pages: 1182-1188
• DOI: https://doi.org/10.1109/TED.2016.2522501
• Keywords: substrates, through-silicon vias, silicon, capacitance, crosstalk, integrated circuit modeling, analytical models
• Public URL: https://uwe-repository.worktribe.com/output/924336
• Publisher URL: http://dx.doi.org/10.1109/TED.2016.2522501